![PDF] Improvement of voltage linearity in high-/spl kappa/ MIM capacitors using HfO/sub 2/-SiO/sub 2/ stacked dielectric | Semantic Scholar PDF] Improvement of voltage linearity in high-/spl kappa/ MIM capacitors using HfO/sub 2/-SiO/sub 2/ stacked dielectric | Semantic Scholar](https://d3i71xaburhd42.cloudfront.net/fc1fd165807e10a0c91b2f330bd5ce40ab490278/3-Figure4-1.png)
PDF] Improvement of voltage linearity in high-/spl kappa/ MIM capacitors using HfO/sub 2/-SiO/sub 2/ stacked dielectric | Semantic Scholar
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![C-V characteristics of Ir/TiTaO/TaN TiTaO MIM capacitors. for analog... | Download Scientific Diagram C-V characteristics of Ir/TiTaO/TaN TiTaO MIM capacitors. for analog... | Download Scientific Diagram](https://www.researchgate.net/profile/Albert-Chin/publication/242936296/figure/fig1/AS:671517964791812@1537113767351/C-V-characteristics-of-Ir-TiTaO-TaN-TiTaO-MIM-capacitors-for-analog-capacitors-in-the.png)
C-V characteristics of Ir/TiTaO/TaN TiTaO MIM capacitors. for analog... | Download Scientific Diagram
![Figure 3 from Very high density RF MIM capacitors (17 fF/μm/sup 2/) using high-/spl kappa/ Al/sub 2/O3 doped Ta/sub 2/O/sub 5/ dielectrics | Semantic Scholar Figure 3 from Very high density RF MIM capacitors (17 fF/μm/sup 2/) using high-/spl kappa/ Al/sub 2/O3 doped Ta/sub 2/O/sub 5/ dielectrics | Semantic Scholar](https://d3i71xaburhd42.cloudfront.net/1e1a0d311329286f340650513e28a9930418c34e/2-Figure2-1.png)
Figure 3 from Very high density RF MIM capacitors (17 fF/μm/sup 2/) using high-/spl kappa/ Al/sub 2/O3 doped Ta/sub 2/O/sub 5/ dielectrics | Semantic Scholar
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Cross section SEM picture across a typical MIM capacitor. Note that the... | Download Scientific Diagram
![Figure 3 from Very high density RF MIM capacitors (17 fF/μm/sup 2/) using high-/spl kappa/ Al/sub 2/O3 doped Ta/sub 2/O/sub 5/ dielectrics | Semantic Scholar Figure 3 from Very high density RF MIM capacitors (17 fF/μm/sup 2/) using high-/spl kappa/ Al/sub 2/O3 doped Ta/sub 2/O/sub 5/ dielectrics | Semantic Scholar](https://d3i71xaburhd42.cloudfront.net/1e1a0d311329286f340650513e28a9930418c34e/2-Figure3-1.png)